Electron beam exposure apparatus and method, and device manufacturing method

ABSTRACT

An electron beam exposure apparatus which minimizes the influence of the space charge effect and aberrations of a reduction electron optical system, and simultaneously, increases the exposure area which can be exposed at once, thereby increasing the throughput. An electron beam exposure apparatus having a source for emitting an electron beam and a reduction electron optical system for reducing and projecting, on a target exposure surface, an image of the source, includes a correction electron optical system which is arranged between the source and the reduction electron optical system to form a plurality of intermediate images of the source along a direction perpendicular to the optical axis of the reduction electron optical system, and corrects in advance aberrations generated when the intermediate images are reduced and projected on the target exposure surface by the reduction electron optical system.

BACKGROUND OF THE INVENTION

The present invention relates to an electron beam exposure apparatus andmethod, and a device manufacturing method and, more particularly, to anelectron beam exposure apparatus and method in which exposure isperformed by making a source emit an electron beam to form an image bythe electron beam, and reducing and projecting the image on a targetexposure surface by a reduction electron optical system, a stencil masktype electron beam exposure apparatus, and a device manufacturing methodto which the above apparatus or method is applied.

Examples of electron beam exposure apparatuses are apparatuses of apoint beam type which uses a spot-like beam, a variable rectangular beamtype which uses a beam variable in its size and having a rectangularsection, and a stencil mask type which uses a stencil to form a beamhaving a desired sectional shape.

The point beam type electron beam exposure apparatus is exclusively usedfor research and development purposes because of low throughput. Thevariable rectangular beam type electron beam exposure apparatus has athroughput higher than that of the point beam type apparatus by one totwo orders, though the problem of throughput is still serious whenforming an exposure pattern in which about 0.1 μm fine patterns arehighly integrated. The stencil mask type electron beam exposureapparatus uses a stencil mask having a portion corresponding to avariable rectangular aperture in which a plurality ofrepeated-pattern-through-holes are formed. The stencil mask typeelectron beam exposure apparatus can advantageously form repeatedpatterns by exposure, and its throughput is higher than that of thevariable rectangular type electron beam exposure apparatus.

FIG. 2 shows the arrangement of an electron beam exposure apparatushaving a stencil mask. An electron beam from an electron gun 501 isirradiated on a first aperture 502 for defining the electron beamirradiation area of the stencil mask. The illumination electron beamdefined by the first aperture irradiates the stencil mask on a secondaperture 504 through a projection electron lens 503 so that the electronbeam passing through repeated-pattern-through-holes which are formed inthe stencil mask is reduced and projected on a wafer 506 by a reductionelectron optical system 505. The images of therepeated-pattern-through-holes are moved on the wafer by a deflector 507to sequentially expose the wafer.

The stencil mask type electron beam exposure apparatus can form repeatedpatterns by a single exposure operation, so the exposure speed can beincreased. However, although the stencil mask type electron beamexposure apparatus has a plurality of pattern-through-holes, as shown inFIG. 3, the patterns must be formed in advance as the stencil mask inaccordance with the exposure pattern.

Because of the space charge effect and the aberrations of the reductionelectron optical system, the exposure area which can be exposed at onceis limited. If a semiconductor circuit needs so many transfer patternsthat they cannot be formed in one stencil mask, a plurality of stencilmasks must be prepared and used one by one. Time for exchanging the maskis required, resulting in a large decrease in throughput.

When the stencil mask has patterns with different sizes, or when thepattern is a combination of patterns with different sizes, the blur ofthe exposure pattern caused by the space charge effect changes dependingon the size of the pattern. Since the refocus amount changes dependingon the size of the pattern accordingly, the blur cannot be corrected byrefocusing. Therefore, such a pattern cannot be used as a stencil maskpattern.

An apparatus for solving this problem is a multi-electron beam exposureapparatus which irradiates a plurality of electron beams on the samplesurface along designed coordinates, deflects the plurality of electronbeams along the designed coordinates to scan the sample surface, and atthe same time, independently turns on/off the plurality of electronbeams in correspondence with the pattern to be drawn, thereby drawingthe pattern. The multi-electron beam exposure apparatus can draw anarbitrary pattern without using any stencil mask, so the throughput canbe increased.

FIG. 38A shows the arrangement of the multi-electron beam exposureapparatus. Reference numerals 501a, 501b, and 501c denote electron gunscapable of independently turning on/off electron beams; 502, a reductionelectron optical system for reducing and projecting the plurality ofelectron beams from the electron guns 501a, 501b, and 501c on a wafer503; and 504, a deflector for deflecting the plurality of electron beamsreduced and projected on the wafer 503.

The plurality of electron beams from the electron guns 501a, 501b, and501c are deflected by the same amount by the deflector 504. Withreference to the beam reference position, each electron beamsequentially sets its position on the wafer and moves in accordance withan array defined by the deflector 504. The electron beams exposedifferent exposure areas in exposure patterns to be formed.

FIGS. 38B to 38D show a state in which the electron beams from theelectron guns 501a, 501b, and 501c expose the corresponding exposureareas in exposure patterns to be formed in accordance with the samearray. While setting and shifting the positions on the array in theorder of (1,1), (1,2), . . . , (1,16), (2,1), (2,2), . . . , (2,16),(3,1), each electron beam is turned on at a position where an exposurepattern (P1, P2, P3) to be formed is present to expose the correspondingexposure area in the exposure pattern (P1, P2, P3) to be formed (i.e., aso-called raster scan is performed).

However, in the multi-electron beam exposure apparatus using a rasterscan, when the size of the exposure pattern to be formed is small, eachelectron beam must be turned on at a position defined by further finelydividing the exposure region of the electron beam (the array interval ofthe array defined by the deflector 504 decreases). As a result, with thesame exposure area, the number of times of setting the position of theelectron beam and exposing the area increases, resulting in a largedecrease in throughput.

FIG. 43 shows the main part of the multi-electron beam exposureapparatus. Reference numerals 501a, 501b, and 501c denote electron gunscapable of independently turning on/off electron beams; 502, a reductionelectron optical system for reducing and projecting the plurality ofelectron beams from the electron guns 501a, 501b, and 501c on a wafer503; 504, a deflector for scanning the plurality of electron beamsreduced and projected on the wafer 503; 505, a dynamic focus coil forcorrecting the focus position of the electron beam in accordance withany deflection errors generated in the electron beam passing through thereduction electron optical system 502 when the deflector 504 isactuated; and 506, a dynamic stigmatic coil for correcting theastigmatism of the electron beam in accordance with the deflectionerrors.

With the above arrangement, the plurality of electron beams are scannedon the wafer to expose the wafer in which the exposure areas of theelectron beams are adjacent to each other.

However, the deflection errors generated in the plurality of electronbeams passing through the reduction electron optical system 502 when thedeflector 504 is actuated are different from each other. For thisreason, even when the focus position and astigmatism of each electronbeam are corrected by a dynamic focus coil and a dynamic stigmatic coil,optimum correction for each electron beam can hardly be performed.

SUMMARY OF THE INVENTION

It is the first object of the present invention to provide an electronbeam exposure apparatus and method which minimize the influence of thespace charge effect and aberrations of the reduction electron opticalsystem and increase the area which can be exposed at once, therebyincreasing the throughput.

According to the present invention, the foregoing object is attained byproviding an electron beam exposure apparatus having a source foremitting electron beams and a reduction electron optical system forreducing and projecting, on a target exposure surface, an image formedwith the electron beam emitted from the source, comprising: a correctionelectron optical system arranged between the source and the reductionelectron optical system to form a plurality of intermediate images ofthe source for correcting an aberration generated by the reductionelectron optical system, the intermediate images being reduced andprojected on the target exposure surface by the reduction electronoptical system.

According to another aspect of the present invention, the foregoingobject is attained by providing an electron beam exposure method inwhich exposure is performed by making a source emit an electron beam toform an image, and reducing and projecting the image on a targetexposure surface by a reduction electron optical system, comprising: theintermediate image formation step of forming a plurality of intermediateimages of the source for correcting an aberration generated by thereduction electron optical system by a correction electron opticalsystem arranged between the source and the reduction electron opticalsystem.

According to still another aspect of the present invention, theforegoing object is attained by providing an electron beam exposuremethod in which exposure is performed by independently shielding aplurality of electron beams in accordance with an exposure pattern to beformed on a target exposure surface while scanning the plurality ofelectron beams on the target exposure surface, comprising: the exposureprocedure setting step of setting an exposure procedure in which theplurality of electron beams are scanned while skipping a portion whereall the plurality of electron beams are shielded; and the control stepof controlling exposure in accordance with the set exposure procedure.

It is the second object of the present invention to provide an electronbeam exposure apparatus which relaxes the limitation in patterns usablein a stencil mask.

According to the present invention, the foregoing object is attained byproviding an electron beam exposure apparatus having a source foremitting an electron beam and a reduction electron optical system forbringing the electron beam into a focus on a target exposure surface,comprising: electron density distribution adjustment means for adjustingelectron density distribution of the electron beam when the electronbeam passes through a pupil plane of the reduction electron opticalsystem, in which density distribution of an electron density at aperipheral portion on the pupil plane becomes higher than that at acentral portion.

It is the third object of the present invention to provide an electronbeam exposure apparatus and method which suppress a decrease inthroughput for a fine pattern.

According to the present invention, the foregoing object is attained byproviding an electron beam exposure apparatus which has a deflector fordeflecting a plurality of electron beams and exposes a target exposuresurface by deflecting the plurality of electron beams, andsimultaneously, independently controlling irradiation of the pluralityof electron beams, comprising: control means for controlling an exposureoperation such that a unit of deflection by the deflector is set to besmall in a first area where a contour area of a pattern is formed byexposure with at least one of the plurality of electron beams, and theunit of deflection by the deflector is set to be large in a second areadifferent from the first area, where an inner area of the pattern isformed by exposure with at least one of the plurality of electron beams.

According to another aspect of the present invention, the foregoingobject is attained by providing an electron beam exposure method inwhich a target exposure surface is exposed by deflecting a plurality ofelectron beams by a common deflector, and simultaneously, independentlycontrolling irradiation of the plurality of electron beams, comprising:the control step of controlling an exposure operation to set a unit ofdeflection by the deflector to be small in a first area where a contourarea of a pattern is formed by exposure with at least one of theplurality of electron beams, and the unit of deflection by the deflectoris set to be large in a second area different from the first area, wherean inner area of the pattern is formed by exposure with at least one ofthe plurality of electron beams.

According to still another aspect of the present invention, theforegoing object is attained by providing an electron beam exposuremethod in which a target exposure surface is exposed by deflecting aplurality of electron beams by a common deflector, and simultaneously,independently controlling irradiation of the plurality of electronbeams, comprising: the area determination step of determining, on thebasis of an exposure pattern to be formed on the target exposuresurface, a first area where a contour area of the pattern is formed byexposure with at least one of the plurality of electron beams and asecond area different from the first area, where an inner area of thepattern is formed by exposure with at least one of the plurality ofelectron beams; and the control step of controlling an exposureoperation to set a unit of deflection by the deflector to be small inthe first area, and the unit of deflection is set by the deflector to belarge in the second area.

It is the fourth object of the present invention to provide an electronbeam exposure apparatus and method which can independently correctaberrations generated in a plurality of electron beams.

According to the present invention, the foregoing object is attained byproviding an electron beam exposure apparatus having a source foremitting an electron beam, and a reduction electron optical system forreducing and projecting, on a target exposure surface, an image formedwith the electron beam emitted from the source, comprising: an elementelectron optical system array constituted by arranging a plurality ofsubarrays each including at least one element electron optical systemwhich forms an intermediate image of the source between the source andthe reduction electron optical system with the electron beam emittedfrom the source; deflection means for deflecting an electron beam fromthe element electron optical system array to scan the target exposuresurface; and correction means for correcting in units of subarrays adeflection error generated when the electron beam from the elementelectron optical system array is deflected by the deflection means.

According to another aspect of the present invention, the foregoingobject is attained by providing an electron beam exposure method inwhich exposure is performed by making a source emit an electron beam toform an image, and reducing and projecting the image on a targetexposure surface by a reduction electron optical system, comprising: thecorrection step of correcting, in units of subarrays, a deflection errorgenerated when an electron beam from an element electron optical systemarray constituted by arranging the plurality of subarrays each includingat least one element electron optical system which forms an intermediateimage between the source is deflected to scan the target exposuresurface.

It is the fifth object of the present invention to provide a method ofmanufacturing a device by using the above electron beam exposureapparatus and method.

Further objects, features and advantages of the present invention willbecome apparent from the following detailed description of embodimentsof the present invention with reference to the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a view for explaining the arrangement of an electron beamsexposure apparatus according to the present invention;

FIG. 2 is a view for explaining the arrangement of a stencil mask typeelectron beam exposure apparatus;

FIG. 3 is a view for explaining the concept of exposure by the stencilmask type electron beam exposure apparatus;

FIGS. 4A and 4B are views for explaining the principle of the presentinvention;

FIGS. 5A and 5B are views for explaining an element electron opticalsystem

FIGS. 6A and 6B are views for explaining the element electron opticalsystem;

FIG. 7 is a view showing the wiring of a blanking electrode;

FIG. 8 is a view for explaining the upper and lower aperture electrodesof the element electron optical system;

FIG. 9 is a view for explaining the intermediate aperture electrode ofthe element electron optical system;

FIGS. 10A and 10B are views for explaining unipotential lenses eachhaving astigmatism;

FIGS. 11A to 11C are views for explaining an exposure pattern andexposure pattern data generated from the exposure pattern;

FIG. 12 a view for explaining a blanking signal transmitted to eachelement electron optical system;

FIGS. 13A and 13B are views for explaining arrangement 1 of the electronoptical system;

FIGS. 14A and 14B re views for explaining arrangement 2 of the elementelectron optical system;

FIG. 15 is view for explaining the arrangement of an electron beamexposure apparatus according to the present invention;

FIG. 16 is view for explaining an element electron optical system array;

FIG. 17 is a view for explaining the scan field of a subarray;

FIG. 18 is a view for explaining the scan field of the element electronoptical system array;

FIG. 19 is a view for explaining the exposure field;

FIGS. 20A to 20C are views for explaining the arrangement of an electronbeam exposure apparatus according to the present invention;

FIGS. 21A and 21B are views for explaining the arrangement of anelectron beam exposure apparatus according to the present invention;

FIG. 22 is a graph for explaining the electron density distribution on apupil plane;

FIG. 23 is a view for explaining the arrangement of an electron beamexposure apparatus according to the present invention;

FIG. 24 is a view for explaining an element electron optical systemarray;

FIG. 25 is a view for explaining an element electron optical system;

FIGS. 26A and 26B are views for explaining the electrodes of the elementelectron optical system;

FIG. 27 is a block diagram for explaining the control arrangement of anelectron beam exposure apparatus according to the present invention;

FIGS. 28A and 28B are views for explaining exposure patterns to beformed by element electron optical systems;

FIGS. 29A and 29B are views for explaining the method of determiningareas R, F, and N on the basis of the patterns shown in FIGS. 28A and28B;

FIG. 30A is a view for explaining the method of determining areas FF,RR, and NN on the basis of data associated with the areas R, F, and Nshown in FIGS. 29A and 29B;

FIG. 30B is a view showing the result of division of the area RR shownin FIG. 30A by an array element RME;

FIGS. 31A to 31C are views for explaining exposure control data;

FIGS. 32A and 32B are views for explaining blanking control data;

FIG. 33 is a view for explaining the exposure control data;

FIG. 34A is a view for explaining the area to be continuously exposed bythe array element RME;

FIG. 34B is a view for explaining the area to be continuously expose anarray element FME;

FIG. 35 is view for explaining the subarray exposure field (SEF);

FIG. 36 is a view for explaining the subfield;

FIG. 37 is a flow chart for explaining preparation of the exposurecontrol data;

FIGS. 38A to 38D are views for explaining a conventional multi-electronbeam exposure apparatus;

FIGS. 39A to 39C are views for explaining marks on a stage referenceplate;

FIG. 40 is a view for explaining the exposure field;

FIG. 41 is a flow chart for explaining preparation of an exposurecontrol data file;

FIG. 42 is a view for explaining a deflector arranged for each subarray;

FIG. 43 is a view for explaining the conventional multi-electron beamexposure apparatus;

FIG. 44 is a flow chart for explaining calibration;

FIG. 45 is a flow chart for explaining the manufacture of a microdevice;and

FIG. 46 is a flow chart for explaining a wafer process.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

First Mode of Carrying Out the Invention

Description of Principle!

FIGS. 4A and 4B are views for explaining the principle of the presentinvention. Reference symbol PL denotes a reduction electron opticalsystem; and AX, an optical axis of the reduction electron optical systemPL. Reference numerals 01, 02, and 03 denote point sources for emittingelectrons; and II, I2, and I3, point source images corresponding to thepoint sources.

Referring to FIG. 4A, electrons emitted from the point sources 01, 02,and 03 which are located on a plane perpendicular to the optical axis AXon the object side of the reduction electron optical system PL form thepoint source images I1, I2, and I3 corresponding to the point sources onthe image side of the reduction electron optical system PL. The pointsource images I1, I2, and I3 are not formed on the same planeperpendicular to the optical axis AX because of the aberrations(curvature of field) of the reduction electron optical system.

In the present invention, to form the point source images I1, I2, and I3on the same plane perpendicular to the optical axis AX, as shown in FIG.4B, the point sources 01, 02, and 03 are located at different positionsalong the optical axis in accordance with the aberrations (curvature offield) of the reduction electron optical system. In addition, since theaberrations (astigmatism, coma, or distortion) of the reduction electronoptical system change depending on the positions of the sources on theobject side, desired source images are formed on the same plane bydistorting the sources in advance.

In the present invention, a correction electron optical system isarranged to form a plurality of intermediate images of a source on theobject side of the reduction electron optical system and to correct inadvance the aberrations generated when the intermediate images arereduced and projected on a target exposure surface by the reductionelectron optical system. With this arrangement, a lot of source imageseach having a desired shape can be simultaneously formed in a wideexposure area.

The plurality of intermediate images need not always be formed from onesource, and may be formed from a plurality of sources, as a matter ofcourse.

Embodiments of the present invention will be described below in detail.

(First Embodiment)

Description of Constituent Elements of Exposure System!

FIG. 1 is a view showing an electron beam exposure apparatus accordingto the first embodiment of the present invention.

Referring to FIG. 1, reference numeral 1 denotes an electron gunconsisting of a cathode 1a, a grid 1b, and an anode 1c. Electronsemitted from the electron gun 1 form crossover image between the grid 1band the anode 1c.

The electron gun 1 has a function of changing the grid voltage so as tochange the size of the crossover image.

Since an electron optical system (not shown) for enlarging/reducing orshaping the crossover image is used, an enlarged/reduced or shapedcrossover image can be obtained. With this arrangement, the size andshape of the crossover image can be changed (the crossover image will bereferred to as a source hereinafter).

Electrons emitted from the source are formed into an almost collimatedelectron beam through a condenser lens 2 whose front focal position isset at the position of the source. The almost collimated electron beamis incident on a correction electron optical system 3 in which aplurality of element electron optical systems (31, 32) (the number ofelement electron optical systems is preferably as large as possible,though two element electron optical systems are illustrated for thedescriptive convenience) are aligned in a direction perpendicular to theoptical axis. The plurality of element electron optical systems (31, 32)constituting the correction electron optical system 3 will be describedlater in detail.

The correction electron optical system 3 forms a plurality of immediateimages (MI1, MI2) of the source. The intermediate images form sourceimages (I1, I2) on a wafer 5 through a reduction electron optical system4. The elements of the correction electron optical system 3 are set tomake the interval between the source images on the wafer 5 an integermultiple of the size of the source image. The correction electronoptical system 3 changes the positions of the intermediate images alongthe optical axis in accordance with the curvature of field of thereduction electron optical system 4, and at the same time, corrects inadvance any aberrations generated when the intermediate images arereduced and projected on the wafer 5 by the reduction electron opticalsystem 4.

The reduction electron optical system 4 is a symmetrical magnetic tabletconsisting of a first projecting lens 41 and a second projecting lens42. When the focal length of the first projecting lens 41 is representedby f1, and that of the second projecting lens 42 is represented by f2,the distance between the two lenses is f1+f2. The intermediate image onthe optical axis AX is formed at the focal position of the firstprojecting lens 41, and the image of the intermediate image is formed atthe focal point of the second projecting lens 42. This image is reducedto -f2/f1. Since the two lens magnetic fields are determined to act inopposite directions, Seidel's aberrations except five aberrations, i.e.,spherical aberration, isotropic astigmatism, isotropic coma, curvatureof field, and on-axis chromatic aberration, and chromatic aberrationsassociated with rotation and magnification are canceled in theory.

A deflector 6 deflects the electron beams from the plurality ofintermediate images to move the images of the plurality of intermediateimages in the X and Y directions on the wafer. The deflector 6 isconstituted by an MOL (Moving Object Lens) type electromagneticdeflector 61 which deflects a beam by a converging magnetic field and adeflection magnetic field satisfying the MOL condition, and anelectrostatic deflector 62 which deflects a beam by an electric field.The electromagnetic deflector 61 and the electrostatic deflector 62 areselectively used in accordance with the moving distance of the sourceimage. A dynamic focus coil 7 corrects any shift in focal positioncaused by deflection errors generated when the deflector is actuated. Adynamic stigmatic coil 8 corrects astigmatism generated by deflection.

Each of deflectors 91 and 92 is constituted by a plurality ofelectrostatic deflectors for translating (in the X and Y directions) ordeflecting (tilt with respect to the Z-axis) the electron beam from theplurality of intermediate images formed by the correction electronoptical system.

A Faraday cup 10 has two single knife-edges extending along the X and Ydirections.

An X-Y-Z stage 11 is movable in the X, Y, and Z directions whilemounting the wafer 5 thereon, and is controlled by a stage drive controlunit 23.

The Faraday cup 10 fixed on the wafer stage detects the charge amount ofthe source image formed with the electron beam from the element electronoptical system while moving through the knife-edges in cooperation witha laser interferometer 20 for detecting the position of the X-Y-Z stage.With this arrangement, the size and position (X,Y,Z) of the sourceimage, and the current irradiated from the element electron opticalsystem can be detected.

The element electron optical system constituting the correction electronoptical system 3 will be described below with reference to FIGS. 5A and5B.

Referring to FIG. 5A, reference numeral 301 denotes a blanking electrodeconsisting of a pair of electrodes and having a deflection function;302, an aperture stop having an aperture (AP) for defining the shape ofthe electron beam passing through the aperture, on which a wiring layer(W) for turning on/off the blanking electrode 301 is formed; 303, aunipotential lens consisting of three aperture electrodes and having aconverging function of setting the upper and lower electrodes at anacceleration potential V0 and keeping the intermediate electrode atanother potential V1; and 304, a blanking aperture positioned on thefocal plane of the aperture stop 302.

The electron beam which is nearly collimated by the condenser lens 2 isformed into an intermediate image (MI) of the source on the blankingaperture 304 by the unipotential lens 303 through the blanking electrode301 and the aperture (AP). If, at this time, no electric field isapplied between the electrodes of the blanking electrode 301, anelectron beam 305 is transmitted through the aperture of the blankingaperture 304. On the other hand, when an electric field is appliedbetween the electrodes of the blanking electrode 301, an electron beam306 is shielded by the blanking aperture 304. Since the electron beams305 and 306 have different angular distributions on the blankingaperture 304 (the object plane of the reduction electron opticalsystem), the electron beams 305 and 306 are incident on different areasat the pupil position (on a plane P in FIG. 1) of the reduction electronoptical system, as shown in FIG. 5B. Therefore, in place of the blankingaperture 304, a blanking aperture 304' for passing only the electronbeam 305 may be formed at the pupil position (on the plane P in FIG. 1)of the reduction electron optical system. The blanking aperture can becommonly used by other element electron optical systems constituting thecorrection electron optical system 3.

In this embodiment, a unipotential lens having a converging function isused. However, a bipotential lens having a diverging function may beused to form a virtual intermediate image.

Referring back to FIG. 1, the correction electron optical system 3changes the positions of intermediate images formed by the elementelectron optical systems along the optical axis in accordance with thecurvature of field of the reduction electron optical system 4. As aspecific means therefor, identical element electron optical systems areused and set at different positions along the optical axis. As anothertechnique, the element electron optical systems are set on the sameplane, and the electron optical characteristics (focal length and majorsurface position) of the element electron optical systems, and moreparticularly, the unipotential lenses are changed to change thepositions of the intermediate images along the optical axis. The lattermeans employed in this embodiment will be described in detail withreference to FIGS. 6A and 6B.

Referring to FIG. 6A, blanking electrodes are formed for each apertureof the aperture stop 302 having two apertures (AP1, AP2) with the sameshape, thereby constituting a blanking array. The blanking electrodesare independently wired to independently turn on/off the electric fields(FIG. 7).

Unipotential lenses 303-1 and 303-2 constitute a lens array by bondingthree insulators 307 to 309 each having an electrode formed thereon. Theelectrodes are wired such that upper and lower electrodes (303U, 303D)can be set at a common potential (FIG. 8), and intermediate electrodes(303M) can be independently set at different potentials (FIG. 9). Theblanking array and lens array form an integral structure whileinterposing an insulator 310.

The electrodes of the unipotential lenses 303-1 and 303-2 have the sameshape. The focal lengths are different because the potentials of theintermediate electrodes are different. Therefore, the intermediateimages (MI1, MI2) formed with electron beams 311 and 312 are located atdifferent positions along the optical axis, respectively.

FIG. 6B shows another example of the element electron optical systemwhich uses two lens arrays shown in FIG. 6A. Each element electronoptical system is constituted by two unipotential lenses arranged at apredetermined interval. With this arrangement, the focal length andprincipal plane position of each element electron optical system can beindependently controlled. When the focal length of the unipotential lens303-1 is represented by f1, that of a unipotential lens 303-1' isrepresented by f2, the distance between the unipotential lenses isrepresented by e, the synthesized focal length is represented by f, andthe principal plane position on the image plane side (the distance fromthe unipotential lens 303-1' toward the source side) is represented bys, the following equations hold paraxially:

    1/f=1/f1+1/f2-e(f1×f2)

    s=e×f/f1

By adjusting the focal length of each unipotential lens (the potentialof the intermediate electrode of each unipotential lens), thesynthesized focal length and principal plane position of each elementelectron optical system can be independently set within limited ranges.The focal position (intermediate image formation position) changes by adistance corresponding to the moving amount of the major principalplane, as a matter of course. The focal lengths of the element electronoptical systems can be made almost equal, and just the focal positionscan be changed. In other words, the intermediate images of the sourcecan be formed by the element electron optical systems at the samemagnification (finally, the source images I1 and I2 on the wafer 5 areformed at the same magnification) while changing just the positions ofthe intermediate images along the optical axis. Therefore, theintermediate images (MI1, MI2) of the electron beams 311 and 312 can beformed at different positions along the optical axis. In thisembodiment, the element electron optical system is constituted by twounipotential lenses. However, the element electron optical system may beconstituted by three or more unipotential lenses.

To correct astigmatism generated when each intermediate image is reducedand projected on the target exposure surface by the reduction electronoptical system 4, each element electron optical system generatesastigmatism of opposite sign. To generate the astigmatism of oppositesign, the shape of the aperture electrode constituting the unipotentiallens is distorted. As shown in FIG. 10A, when the unipotential lens303-1 has a circular aperture electrode 350, electrons distributed in adirection M and electrons distributed in a direction S form intermediateimages at almost the same position 313. However, when a unipotentiallens 303-3 has an elliptical aperture electrode 351, electronsdistributed in the direction M (along the short diameter) form anintermediate image at a position 314, and electrons distributed in thedirection S (along the long diameter) form an intermediate image at aposition 315. With this arrangement, astigmatism of opposite sign can begenerated.

As shown in FIG. 10B, the intermediate electrode 303M of theunipotential lens 303-1 is divided into four portions. The potentials ofopposing electrodes are set to be V1, and the potentials of the otheropposing electrodes are set to be V2. The potentials V1 and V2 may bechanged by a focus control circuit, and the function of the unipotentiallens 303-1 can also be obtained in this case.

As described above, when the shape of the aperture electrode of theunipotential lens of each element electron optical system is changed inaccordance with the astigmatism of the reduction electron optical system4, astigmatism generated when each intermediate image is reduced andprojected on the target exposure surface by the reduction electronoptical system 4 can be corrected. One element electron optical systemmay be constituted by the unipotential lens 303-1 for correctingcurvature of field and the unipotential lens 303-3 for correctingastigmatism such that the curvature of field and the astigmatism can beindependently corrected or adjusted, as a matter of course.

To correct coma generated when each intermediate image is reduced andprojected on the target exposure surface by the reduction electronoptical system 4, each element electron optical system generates coma ofopposite sign. As a technique of generating the coma of opposite sign,the aperture on the aperture stop 302 is decentered with respect to theoptical axis of the unipotential lens 303 in each element electronoptical system. As another technique, the electron beams from theplurality of intermediate images are independently deflected by thedeflectors (91, 92) in each element electron optical system.

To correct distortion generated when each intermediate image is reducedand projected on the target exposure surface by the reduction electronoptical system 4, the distortion characteristic of the reductionelectron optical system 4 is determined in advance, and the position ofeach element electron optical system along the direction perpendicularto the optical axis of the reduction electron optical system 4 is set onthe basis of the distortion characteristic.

Description of Operation!

The source images (I1, I2) formed on the wafer 5 by the element electronoptical systems (31, 32) are deflected by the deflector 6 starting fromreference positions (A, B) by the same predetermined amount as indicatedby arrows in FIG. 11A, respectively, in their respective scan fields toexpose the corresponding scan fields of the wafer 5. In FIG. 11A, eachcell indicates an area to be exposed to one source image. Each hatchedcell indicates an area to be exposed, and each unhatched cell indicatesan area not to be exposed.

The procedures of preparing an exposure control data file forcontrolling the above exposure operation will be described below withreference to FIG. 41.

Upon receiving the pattern data of an exposure pattern as shown in FIG.11A, a CPU 12 divides the exposure area into scan fields in units ofelement electron optical systems in step S001. As shown in FIG. 11B,exposure control data consists of the position data (dx,dy) of theexposure position based on the start position (A, B) in each scan fieldand exposure data representing whether exposure is to be performed atthe exposure position in each scan field ("1" is set for a hatched cell,and "0" is set for an unhatched cell). The exposure control data arearranged in the order of exposure, thereby preparing an exposure controldata file. The scan field of each element electron optical system isdeflected by the deflector 6 and moved from the reference position (A,B) in the same predetermined amount. Therefore, exposure data of aplurality of scan fields is combined with one position data.

In step S002, when exposure is not performed in any scan field, i.e.,when all exposure data are set at "0", the exposure control data aredeleted (exposure data represented by DEL in FIG. 11B) to prepare a newexposure control data file as shown in FIG. 11C. The exposure controldata file is stored in a memory 19 through an interface 13. By using theexposure control data prepared in the above manner, a deflection controlcircuit 21 can be operated such that scanning is performed whileskipping portions where all exposure data are set at "0".

When the input pattern has a lot of repeated patterns at a specificperiod (pitch) (e.g., a DRAM circuit pattern consisting of a lot ofpatterns repeated at a period corresponding to the cell pitch), the CPU12 sets the start position of each scan field in step S003 such that theinterval of the start positions of the scan fields (the interval betweenthe positions of sources formed on the wafer through the elementelectron optical systems) becomes an integer multiple of the specificperiod (pitch). With this processing, the number of exposure controldata for which all exposure data are set at "0" increases, and the datacan be further compressed. For this purpose, the magnification of thereduction electron optical system 4 is adjusted (the focal lengths ofthe first and second projecting lenses 41 and 42 are changed by amagnification adjustment circuit 22). Alternatively, the positions ofintermediate images formed by the element electron optical systems areadjusted by the deflectors 91 and 92.

Assume that a pattern has already been formed on the wafer 5, and thatpattern is to be double-exposed to a pattern input to the apparatus. Insome cases, the wafer may have expanded/contracted in processes beforethe double-exposure, and the previously formed pattern may also haveexpanded/contracted. In this apparatus, an alignment unit (wafer markposition detection unit) (not shown) is used to detect the positions ofat least two wafer alignment marks on the wafer 5, thereby detecting theexpansion/contraction ratio of the already formed pattern. Themagnification of the reduction electron optical system 4 is adjusted bythe magnification adjustment circuit 22 on the basis of the detectedexpansion/contraction ratio to increase/decrease the interval betweenthe source images. At the same time, the gain of the deflector 6 isadjusted by the deflection control circuit 21 to increase/decrease themoving amount of the source image. With this arrangement,double-exposure can be satisfactorily performed even for anexpanded/contracted pattern.

Referring back to FIG. 1, the operation of this embodiment will bedescribed. When a calibration instruction for the exposure system isoutput from the CPU 12, a sequence controller 14 sets, through a focuscontrol circuit 15, the potentials of the intermediate electrodes of theelement electron optical systems to form intermediate images by theelement electron optical systems of the correction electron opticalsystem 3 at predetermined positions along the optical axis.

The sequence controller 14 controls a blanking control circuit 16 toturn on the blanking electrodes except that of the element electronoptical system 31 (blanking on) such that only the electron beam fromthe element electron optical system 31 is irradiated on the X-Y-Z stage11 side. Simultaneously, the X-Y-Z stage 11 is driven by the stage drivecontrol unit 23 to move the Faraday cup 10 close to the source imageformed by the electron beam from the element electron optical system 31.The position of the X-Y-Z stage 11 at this time is detected by the laserinterferometer 20. While detecting the position of the X-Y-Z stage 11and moving the X-Y-Z stage, the source image formed by the electron beamfrom the element electron optical system 31 is detected by the Faradaycup 10, thereby detecting the position and size of the source image andthe irradiated current. A position (X1,Y1,Z1) where the source imageassumes a predetermined size and a current I1 irradiated at that timeare detected.

The sequence controller 14 controls the blanking control circuit 16 toturn on the blanking electrodes except that of the element electronoptical system 32 such that only the electron beam from the elementelectron optical system 32 is irradiated on the X-Y-Z stage 11 side.Simultaneously, the X-Y-Z stage 11 is driven by the stage drive controlunit 23 to move the Faraday cup 10 close to the source image formed bythe electron beam from the element electron optical system 32. Theposition of the X-Y-Z stage 11 at this time is detected by the laserinterferometer 20. While detecting the position of the X-Y-Z stage 11and moving the X-Y-Z stage, the source image formed by the electron beamfrom the element electron optical system 32 is detected by the Faradaycup 10, thereby detecting the position and size of the source image andthe irradiated current. In this way, the sequence controller 14 detectsa position (X2,Y2,Z2) where the source image has a predetermined sizeand a current I2 irradiated at that time.

On the basis of the detection results, the sequence controller 14translates the intermediate images in the X and Y directions by thedeflectors 91 and 92 through an optical axis alignment control circuit18 to locate the source images formed by the electron beams from theelement electron optical systems 31 and 32 to hold a predeterminedrelative positional relationship along the X and Y directions. Thesequence controller 14 also sets the potentials of the intermediateelectrodes of the element electron optical systems again through thefocus control circuit 15 to locate the source images formed by theelectron beams from the element electron optical systems 31 and 32within a predetermined range along the Z direction. In addition, thedetected currents of the element electron optical systems, which areirradiated on the wafer, are stored in the memory 19.

When pattern exposure is started in accordance with an instruction fromthe CPU 12, the sequence controller 14 calculates, on the basis of thesensitivity of a resist applied to the wafer 5 which has been input inthe memory 19 in advance, and the current irradiated on the wafer byeach element electron optical system which has been stored in the memory19 as described above, the exposure time at the exposure position of thesource image (the time of stay of the source image at the exposureposition) formed by each element electron optical system, and transmitsthe calculated exposure time to the blanking control circuit 16. Thesequence controller 14 also transmits the exposure control data filestored in the memory 19 as described above to the blanking controlcircuit 16. The blanking control circuit 16 sets the blanking OFF time(exposure time) for each element electron optical system. The blankingcontrol circuit 16 also transmits a blanking signal as shown in FIG. 12to each element electron optical system, on the basis of the exposuredata for each element electron optical system and the blanking off timefor each element electron optical system, which are stored in thetransmitted exposure control file, in synchronism with the deflectioncontrol circuit 21, thereby controlling the exposure timing and exposureamount for each element electron optical system (the exposure time ateach exposure position of field 1 is longer than that of field 2).

The sequence controller 14 also transmits the exposure control data filestored in the memory 19 as described above to the deflection controlcircuit 21. On the basis of the position data in the received exposurecontrol file, the deflection control circuit 21 transmits a deflectioncontrol signal, a focus control signal, and an astigmatism correctionsignal to the deflector 6, the dynamic focus coil 7, and the dynamicstigmatism coil 8, respectively, through a D/A converter in synchronismwith the blanking control circuit 16. With this operation, the positionsof the plurality of source images on the wafer are controlled.

When the shift of the focus position caused by deflection errorsgenerated when the deflector is actuated cannot be completely correctedby the dynamic focus coil, the potentials of the intermediate electrodesof the element electron optical systems may be adjusted through thefocus control circuit 15 to set the source image within a predeterminedrange along the Z-axis, thereby changing the positions of theintermediate images along the optical axis.

Other Arrangement 1 of Element Electron Optical System!

Other arrangement 1 of the element electron optical system will bedescribed with reference to FIG. 13A. The same reference numerals as inFIG. 5A denote the same constituent elements in FIG. 13A, and a detaileddescription thereof will be omitted.

This arrangement is largely different from the element electron opticalsystem shown in FIG. 5A in the aperture shape on the aperture stop andthe blanking electrode. The aperture (AP) shields an electron beam whichenters near the optical axis of the unipotential lens 303 to form ahollow beam (hollow cylindrical beam). A blanking electrode 321 isconstituted by a pair of cylindrical electrodes in correspondence withthe aperture shape.

The electron beam which is formed into an almost collimated beam by thecondenser lens 2 passes through the blanking electrode 321 and anaperture stop 320 and forms an intermediate image of the source on theblanking aperture 304 through the unipotential lens 303. If, at thistime, no electric field is applied between the electrodes of theblanking electrode 321, an electron beam 323 is transmitted through theaperture of the blanking aperture 304. On the other hand, when anelectric field is applied between the electrodes of the blankingelectrode 321, an electron beam 324 is deflected and shielded by theblanking aperture 304. Since the electron beams 323 and 324 havedifferent angular distributions on the blanking aperture 304 (the objectplane of the reduction electron optical system), the electron beams 323and 324 are incident on different areas at the pupil position (P inFIG. 1) of the reduction electron optical system, as shown in FIG. 13B.Therefore, in place of the blanking aperture 304, the blanking aperture304' for passing only the electron beam 323 may be formed at the pupilposition of the reduction electron optical system. The blanking aperturecan be commonly used by other element electron optical systemsconstituting the correction electron optical system 3.

Since the space charge effect of a hollow electron beam (hollowcylindrical beam) is smaller than that of a nonhollow electron beam(e.g., a Gaussian beam), the electron beam can be brought to a focus onthe wafer to form a source image free from any blur on the wafer. Morespecifically, when the electron beam from each element electron opticalsystem passes through the pupil plane P of the reduction electronoptical system 4, the electron beam on the pupil plane obtains anelectron density distribution in which the electron density at theperipheral portion becomes higher than that at the central portion. Withthis arrangement, the above effect can be obtained. The electron densitydistribution on the pupil plane P can be obtained by the aperture(aperture for shielding light at the central portion) on the aperturestop 320 arranged at a position almost conjugate to the pupil plane P ofthe reduction electron optical system 4, as in this embodiment.

Other Arrangement 2 of Element Electron Optical System!

Other arrangement 2 of the element electron optical system will bedescribed below with reference to FIG. 14A. The same reference numeralsas in FIG. 5A or 13A denote the same constituent elements in FIG. 14A,and a detailed description thereof will be omitted.

This arrangement is largely different from the element electron opticalsystem shown in FIG. 5A in the aperture shape on the aperture stop (thesame shape as that of the aperture stop in FIG. 13A) and omission of theblanking electrode.

The electron beam formed into an almost collimated beam by the condenserlens 2 passes through an aperture stop 322 and forms an intermediateimage of the source on the blanking aperture 304 through theunipotential lens 303. When the intermediate electrode of theunipotential lens 303 is set at a predetermined potential, the electronbeam is converged, and an electron beam 330 is transmitted through theaperture of the blanking aperture 304. On the other hand, when theintermediate electrode is set at the same potential as that of otherelectrodes, the electron beam is not converged, and an electron beam 331is shielded by the blanking aperture 304. By changing the potential ofthe intermediate electrode of the unipotential lens 303, blanking can becontrolled.

Since the electron beams 330 and 331 have different angulardistributions on the blanking aperture 304 (the object plane of thereduction electron optical system), the electron beams 330 and 331 areincident on different areas at the pupil position (P in FIG. 1) of thereduction electron optical system, as shown in FIG. 14B. Therefore, inplace of the blanking aperture 304, the blanking aperture 304' forpassing only the electron beam 330 may be formed at the pupil positionof the reduction electron optical system. The blanking aperture can becommonly used by other element electron optical systems constituting thecorrection electron optical system 3.

(Second Embodiment)

Description of Constituent Elements of Exposure System!

FIG. 15 is a view showing an electron beam exposure apparatus accordingto the second embodiment of the present invention. Reference numerals asin FIG. 1 denote the same constituent elements in FIG. 15, and adetailed description thereof will be omitted.

Referring to FIG. 15, electrons emitted from the source of an electrongun 1 are formed into an almost collimated electron beam by a condenserlens 2 whose front focal position is set at the position of the source.The almost collimated electron beam is incident on an element electronoptical system array 130 (corresponding to the correction electronoptical system 3 of the first embodiment) formed by arraying a pluralityof element electron optical systems described with reference to FIG. 13Ain a direction perpendicular to the optical axis, thereby forming aplurality of intermediate images of the source. The element electronoptical system array 130 has a plurality of subarrays each of which isformed by arranging a plurality of element electron optical systemshaving the same electron optical characteristics. At least two subarrayshave element electron optical systems with different electron opticalcharacteristics. The element electron optical system array 130 will bedescribed later in detail.

A deflector 140 for deflecting (tilt with respect to the Z-axis) theelectron beam incident on the subarray is arranged for each subarray.The deflector 140 has a function of correcting, in units of subarrays,the difference in incident angle between electron beams which areincident on subarrays at different positions because of the aberrationof the condenser lens 2.

A deflector 150 translates (in the X and Y directions) and deflects(tilt with respect to the Z-axis) electron beams from the plurality ofintermediate images formed by the subarrays. The deflector 150corresponds to the deflector 91 or 92 of the first embodiment. Thedeflector 150 is different from the deflector 91 or 92 in that thedeflector 150 translates and deflects the plurality of electron beamsfrom the subarrays at once.

The plurality of intermediate images formed by the element electronoptical system array 130 are reduced and projected on a wafer 5 througha reduction electron optical system 100 and a reduction electron opticalsystem 4.

In this embodiment, two-step reduction is employed to decrease thereduction ratio without making the exposure apparatus bulky. Thereduction electron optical system 100 is constituted by a firstprojecting lens 101 and a second projecting lens 102, like the reductionelectron optical system 4. That is, one reduction electron opticalsystem is constituted by the reduction electron optical system 4 and thereduction electron optical system 100.

When the number of electron beams from the element electron opticalsystem array increases, the size of the beam incident on the reductionelectron optical system increases, and blurs are generated in the sourceimages due to the space charge effect. To correct these blurs, a refocuscoil 110 controls the focus position on the basis of the number ofsource images (the number of blanking electrodes in the OFF state)irradiated on the wafer, which is obtained from a sequence controller14.

A blanking aperture 120 positioned on the pupil plane of the reductionelectron optical system 100 is common to the element electron opticalsystems constituting the element electron optical system array andcorresponds to the blanking aperture 304' shown in FIG. 13B.

The element electron optical system array 130 will be described belowwith reference to FIG. 16. FIG. 16 shows the element electron opticalsystem array 130 viewed from the electron gun 1 side.

In the element electron optical system array 130, the element electronoptical systems described in FIG. 13A are arrayed. The element electronoptical system array 130 is constituted by a blanking array in which aplurality of apertures, blanking electrodes corresponding to theapertures, and a wiring layer are formed on one substrate, and a lensarray constituted by stacking electrodes constituting a unipotentiallens while interposing insulators. The blanking array and the lens arrayare positioned and coupled to make the apertures oppose thecorresponding unipotential lenses.

Reference numerals 130A to 130G denote subarrays each consisting of aplurality of element electron optical systems. In the subarray 130A, 16element electron optical systems 130A-1 to 130A-16 are formed. Since theamounts of aberrations to be corrected in one subarray remain almost thesame or fall within an allowance, the unipotential lenses of the elementelectron optical systems 130A-1 to 130A-16 have the same apertureelectrode shape and are applied with the same potential. Therefore,wiring lines for applying deferent potentials to the electrodes can beomitted, though the blanking electrodes need independent wiring lines,as in the first embodiment.

A subarray may be divided into a plurality of sub-subarrays, and theelectron optical characteristics (focal length, astigmatism, coma, andthe like) of the element electron optical systems of the sub-subarraysmay be equalized, as a matter of course. At this time, wiring lines forintermediate electrodes are necessary in units of sub-subarrays.

Description of Operation!

A difference from the first embodiment will be described.

In the first embodiment, when calibration for the exposure system is tobe performed, the position (X,Y,Z) where a source image assumes apredetermined size and the current I at that time are detected for allsource images. In the second embodiment, at least one source image whichrepresents the subarray is detected. On the basis of the detectionresult, the sequence controller 14 makes the deflector 15 translate theintermediate images in the subarray in a direction perpendicular to theoptical axis of the reduction electron optical system by the same amountthrough an optical axis alignment control circuit 18 to locate thesource image of the element electron optical system representing thesubarray with a predetermined relative positional relationship along theX and Y directions. In addition, the potential of the intermediateelectrode of each subarray is set again through a focus control circuit15 to locate the source image of the element electron optical systemrepresenting the subarray within a predetermined range along the Zdirection. Furthermore, the detected irradiation current of the elementelectron optical system representing the subarray is stored in a memory19 as the irradiation current of each element electron optical system inthe same subarray.

The source images formed on the wafer 5 through the element electronoptical systems in the subarray are deflected by the same moving amountby a deflector 6 starting from reference positions (full circles) intheir respective scan fields to expose the wafer with the scan fields ofthe respective element electron optical systems adjacent to each other,as shown in FIG. 17. In this fashion, the wafer is exposed by allsubarrays, as shown in FIG. 18. The scan fields are stepped by an amountLy in the Y direction by a deflector 7. Again, the source images aredeflected by the same amount by the deflector 6 starting from thereference positions (full circles) in the scan fields of the respectiveelement electron optical systems to expose the wafer. When the aboveoperation is repeated four times, e.g., in the order of 1, 2, 3 and 4,an exposure field in which the exposure fields of the subarrays areadjacent is formed, as shown in FIG. 19.

(Third Embodiment)

Description of Constituent Elements of Exposure System!

FIGS. 20A to 20C are views showing an electron beam exposure apparatusaccording to the third embodiment of the present invention. The samereference numerals as in FIGS. 1 and 15 denote the same constituentelements in FIGS. 20A to 20C, and a detailed description thereof will beomitted.

In this embodiment, at least one electrode for decelerating oraccelerating the electron beam is added, and a means for changing thesource shape is arranged in the second embodiment.

A unipotential lens serving as an electrostatic lens constituting anelement electron optical system array 130 can realize a smaller electronlens as the electrons have a lower energy.

However, to extract a lot of electron beams from an electron gun 1, theanode voltage must be raised. As a result, electrons from the electrongun 1 may obtain a high energy. In this embodiment, a deceleratingelectrode DCE shown in FIG. 20A is arranged between the electron gun 1and the element electron optical system array 130. The deceleratingelectrode is an electrode at a lower potential than the anode potentialand adjusts the energy of electrons incident on the element electronoptical system array 130. The decelerating electrode can have aperturescorresponding to the element electron optical systems, as shown in FIG.20A, or apertures corresponding to subarrays, as shown in FIG. 20B.

In a reduction electron optical system (4, 100), when the energy of anelectron beam is low, the convergence of the electron beam on the waferis degraded by the space charge effect. Therefore, the energy of theelectron beam from the unipotential lens must be raised (accelerated).In this embodiment, an accelerating electrode ACE as shown in FIGS. 20Ato 20C is arranged between the element electron optical system array 130and the reduction electron optical system (4, 100). The acceleratingelectrode is an electrode at a higher potential than that of the elementelectron optical system array and adjusts the energy of electronsincident on the reduction electron optical system (4, 100). Like thedecelerating electrode, the accelerating electrode may have aperturescorresponding to the element electron optical systems, as shown in FIG.20A, or apertures corresponding to the subarrays, as shown in FIG. 20B.

In the first, second, and third embodiments, the source image istransferred on the wafer and scanned to form a desired exposure pattern.The size of the source image is set to be 1/5 to 1/10 the minimum linewidth of the exposure pattern. When the size of the source image ischanged in accordance with the minimum line width of the exposurepattern, the number of source image moving steps for exposure can beminimized. In this embodiment, an electron optical system 160 as shownin FIG. 20C is arranged to shape the source. The electron optical system160 forms an image S1 of a source S0 of the electron gun 1 through afirst electron lens 161 and further forms an image S2 of the sourceimage S1 through a second electron lens 162. With this arrangement, whenthe focal lengths of the first electron lens 161 and the second electronlens 162 are changed, only the size of the source image S2 can bechanged while fixing the position of the source image S2. The focallengths of the first and second electron lenses 161 and 162 arecontrolled by a source shaping circuit 163.

When an aperture having a desired shape is formed at the position of thesource image S2, not only the size but also the shape of the source canbe changed.

(Fourth Embodiment)

Description of Constituent Elements of Exposure System!

FIGS. 21A and 21B are views showing an electron beam exposure apparatusaccording to the fourth embodiment of the present invention. The samereference numerals as in FIGS. 1, 15, and 20C denote the sameconstituent elements in FIGS. 21A and 21B, and a detailed descriptionthereof will be omitted.

The electron beam exposure apparatus of this embodiment is a stencilmask type exposure apparatus. An electron beam from an electron gun 1 isshaped by a first shaping aperture 200 having an aperture for definingthe illumination area. A stencil mask 230 having pattern through holesare illuminated using a first shaping electron lens 210 (constituted byelectron lenses 211 and 212) and a shaping deflector 220. The drawingpattern elements of the stencil mask 230 are reduced and projected on awafer 5 through a reduction electron optical system (4, 100).

This embodiment is different from the conventional stencil mask typeexposure apparatus in that a stop 241 is arranged near the pupil of thereduction electron optical system 100 to obtain an electron densitydistribution of the electron beam on the pupil plane in which theelectron density at the peripheral portion becomes higher than that atthe central portion. More specifically, a hollow beam forming stop 240whose central portion is shielded as shown in FIG. 21A is arranged. Asshown in FIG. 22, the electron beam from the stencil mask has theelectron density distribution of a hollow beam. For reference, theelectron density distribution of a conventional Gaussian beam is alsoshown in FIG. 22.

As described in Other Arrangement 1 of Element Electron Optical System!,the space charge effect of the hollow beam is smaller than that of theconventional Gaussian beam. For this reason, the electron beam can bebrought to a focus on the wafer to form a source image free from anyblur on the wafer. The electron beam passing through the stencil maskcan be regarded as a source positioned on the stencil mask. When animage of a source having the shape of the pattern of the stencil mask isto be formed on the wafer, a source image having an exact shape can beformed because of the small space charge effect. That is, an exposurepattern having the exact shape of the pattern of the stencil mask can beformed on the wafer.

In this embodiment, the hollow beam forming stop 240 is arranged nearthe pupil plane of the reduction electron optical system 100. However,even when a stop having the same shape as that of the hollow beamforming stop 240 is arranged at a position conjugate to the pupil of thereduction electron optical system 100, e.g., the pupil position of thefirst shaping electron lens 210, or the position of the source S2, thesame effect as described above can be obtained.

The shape or potential of each electrode of the electron gun may beadjusted to form the source itself into a hollow beam shape.

In this embodiment, even when the first shaping aperture 200 has arectangular shape, and a second shaping aperture having a rectangularshape is arranged in place of the stencil mask to constitute a variablerectangular beam type exposure apparatus, the same effect as describedabove can be obtained with the same arrangement.

According to the first to third embodiments,

first, no stencil mask is required;

second, a lot of source images having a desired shape can be formed in awide exposure area; and

third, since the source images are discretely arranged, the sourceimages are not affected by the space charge effect.

Therefore, a desired exposure pattern can be formed at a highthroughput.

By forming a hollow electron beam, the influence of the space chargeeffect is minimized. Particularly, as in the fourth embodiment, thelimitation in patterns usable for a stencil mask can be minimized in astencil mask type electron beam exposure apparatus, so that thethroughput can be further increased.

Second Mode of Carrying Out the Invention

(First Embodiment)

Description of Constituent Elements of Electron Beam Exposure Apparatus!

FIG. 23 is a view showing the main part of an electron beam exposureapparatus according to the present invention.

Referring to FIG. 23, reference numeral 601 denotes an electron gunconsisting of a cathode 601a, a grid 601b, and an anode 601c. Electronsemitted from the cathode 601a form crossover image between the grid 601band the anode 601c (the crossover image will be referred to as sourcehereinafter).

The electrons emitted from the sources are formed into an almostcollimated electron beam by a condenser lens 602 whose front focalposition is set at the position of the source. The almost collimatedelectron beam is incident on an element electron optical system array603. The element electron optical system array 603 is formed by arrayinga plurality of element electron optical systems each consisting of ablanking electrode, an aperture, and an electron lens, in a directionperpendicular to an optical axis AX. The element electron optical systemarray 603 will be described later in detail.

The element electron optical system array 603 forms a plurality ofintermediate images of the source. Each intermediate image is reducedand projected by a reduction electron optical system 604 to form asource image on a wafer 605.

The elements of the element electron optical system array 603 are setsuch that the interval between the sources on the wafer 605 becomes aninteger multiple of the size of source image. The element electronoptical system array 603 changes the positions of the intermediateimages along the optical axis in accordance with the curvature of fieldof the reduction electron optical system 604, and at the same time,corrects in advance any aberration generated when each intermediateimage is reduced and projected on the wafer 605 by the reductionelectron optical system 604, as in the first mode of carrying out theinvention.

The reduction electron optical system 604 is a symmetrical magnetictablet consisting of a first projecting lens 641 (643) and a secondprojecting lens 642 (644). When the focal length of the first projectinglens 641 (643) is represented by f1, and that of the second projectinglens 642 (644) is represented by f2, the distance between the two lensesis f1+f2. The object point on the optical axis AX is located at thefocal position of the first projecting lens 641 (643), and the imagepoint is set at the focal point of the second projecting lens 642 (644).This image is reduced to -f2/f1. Since the two lens magnetic fields aredetermined to act in opposite directions, the Seidel's aberrationsexcept five aberrations, i.e., spherical aberration, isotropicastigmatism, isotropic coma, curvature of field, and on axis chromaticaberration, and chromatic aberrations associated with rotation andmagnification are canceled in theory.

A deflector 606 deflects the plurality of electron beams from theelement electron optical system array 603 to displace the plurality ofsource images in the X and Y directions on the wafer 605 by roughly thesame amounts. The deflector 606 is constituted by a main deflector usedwhen the deflection width is large, and a subdeflector used when thedeflection width is small (neither are shown). The main deflector is anelectromagnetic deflector, and the subdeflector is an electrostaticdeflector.

A dynamic focus coil 607 corrects any shift of the focus position of thesource image caused by deflection errors generated when the deflector606 is actuated. A dynamic stigmatic coil 608 corrects astigmatismcaused by deflection errors generated by deflection, like the dynamicfocus coil 607.

A reflected electron detector 609 detects reflected electrons orsecondary electrons generated when the electron beam from the elementelectron optical system array 603 irradiates an alignment mark formed onthe wafer 605 or a mark formed on a stage reference plate 613.

A Faraday cup 610 having two single knife-edges extending in the X and Ydirections detects the charge amount of the source image formed by theelectron beam from the element electron optical system.

A θ-Z stage 611 with a wafer mounted is movable along the optical axisAX (Z-axis) and in a rotational direction about the Z-axis. A stagereference plate 613 and the Faraday cup 610 are fixed on the θ-Z stage611.

An X-Y stage 612 with the θ-Z stage mounted is movable in the X and Ydirections perpendicular to the optical axis AX (Z-axis).

The element electron optical system array 603 will be described belowwith reference to FIG. 24.

In the element electron optical system array 603, a plurality of elementelectron optical systems are formed into a group (subarray), and aplurality of subarrays are formed. In this embodiment, seven subarrays Ato G are formed. In each subarray, a plurality of element electronoptical systems are two-dimensionally arrayed. In each subarray of thisembodiment, 25 element electron optical systems D(1,1) to D(5,5) areformed. The element electron optical systems form source images whichare arrayed on the wafer at a pitch Pb (μm) in the X and Y directionsthrough the reduction electron optical system 604.

FIG. 25 is a sectional view of each element electron optical system.

Referring to FIG. 25, reference numeral 701 denotes a blanking electrodeconsisting of a pair of electrodes and having a deflection function; and702, a substrate common to the remaining element electron opticalsystems and having an aperture (AP) for defining the shape of thetransmitted electron beam. A wiring layer (W) for turning on/off theblanking electrode 701 is formed on the substrate 702. Reference numeral703 denotes an electron lens using two unipotential lenses 703a and 703beach consisting of three aperture electrodes and having a convergingfunction for setting the upper and lower electrodes at an accelerationpotential V0 and the intermediate electrode at another potential V1 orV2.

Upper, intermediate, and lower electrodes 750 to 752 of the unipotentiallens 703a and upper and lower electrodes 753 and 755 of the unipotentiallens 703b have a shape shown in FIG. 26A. In all the element electronoptical systems, the upper and lower electrodes of the unipotentiallenses 703a and 703b are set at a common potential by a firstfocus/astigmatism control circuit 615.

The potential of the intermediate electrode 751 of the unipotential lens703a can be set for each element electron optical system by the firstfocus/astigmatism control circuit 615. For this reason, the focal lengthof the unipotential lens 703a can be set for each element electronoptical system.

An intermediate electrode 754 of the unipotential lens 703b isconstituted by four electrodes as shown in FIG. 26B. The potentials ofelectrodes 703M can be independently set by the first focus/astigmatismcontrol circuit 615. The potentials of the electrodes 703M are alsoindependently set for each element electron optical system. Therefore,the focal length of the unipotential lens 703b can be changed alongsections perpendicular to each other. The focal length of theunipotential lens 703b can be independently set for each elementelectron optical system. With this arrangement, the astigmatisms of theelement electron optical systems can be independently controlled.

As a result, when the potentials of the intermediate electrodes of theelement electron optical systems are independently controlled, theelectron optical characteristics (intermediate image formation positionsand astigmatisms) of the element electron optical systems can becontrolled.

The electron beam formed into an almost collimated beam by the condenserlens 602 passes through the blanking electrode 701 and the aperture (AP)and forms an intermediate image of the source through the electron lens703. If, at this time, no electric field is applied between theelectrodes of the blanking electrode 701, an electron beam 705 is notdeflected. On the other hand, when an electric field is applied betweenthe electrodes of the blanking electrode 701, an electron beam 706 isdeflected. Since the electron beams 705 and 706 have different angulardistributions on the object plane of the reduction electron opticalsystem 604, the electron beams 705 and 706 are incident on differentareas at the pupil position (on a plane P in FIG. 23) of the reductionelectron optical system 604. Therefore, a blanking aperture BA forpassing only the electron beam 705 is formed at the pupil position (onthe plane P in FIG. 23) of the reduction electron optical system.

To correct curvature of field/astigmatism generated when theintermediate image is reduced and projected on the target exposuresurface by the reduction electron optical system 604, the potentials ofthe two intermediate electrodes of each element electron optical systemare independently set to change the electron optical characteristics(intermediate image formation position and astigmatism) of the elementelectron optical system. In this embodiment, however, to minimize thewiring lines between the intermediate electrodes and the firstfocus/astigmatism control circuit 615, element electron optical systemsin the same subarray are set to have the same electron opticalcharacteristics so that the electron optical characteristics(intermediate image formation positions and astigmatisms) of the elementelectron optical systems are controlled in units of subarrays.

To correct distortion generated when the plurality of intermediateimages are reduced and projected on the target exposure surface by thereduction electron optical system 604, the distortion characteristic ofthe reduction electron optical system 604 is determined in advance, andthe position of each element electron optical system along the directionperpendicular to the optical axis of the reduction electron opticalsystem 604 is set on the basis of the distortion characteristic.

FIG. 27 is a block diagram showing the system configuration of thisembodiment.

A blanking control circuit 614 independently controls ON/OFF of theblanking electrode of each element electron optical system of theelement electron optical system array 603. The first focus/astigmatismcontrol circuit 615 independently controls the electron opticalcharacteristics (intermediate image formation position and astigmatism)of each element electron optical system of the element electron opticalsystem array 603.

A second focus/astigmatism control circuit 616 controls the dynamicstigmatic coil 608 and the dynamic focus coil 607 to control the focalposition and astigmatism of the reduction electron optical system 604. Adeflection control circuit 617 controls the deflector 606. Amagnification adjustment circuit 618 controls the magnification of thereduction electron optical system 604. An optical characteristic controlcircuit 619 changes the excitation current of the electromagnetic lensconstituting the reduction electron optical system 604 to adjust theaberration of rotation and optical axis.

A stage drive control circuit 620 drives and controls the θ-Z stage 611and also drives and controls the X-Y stage 612 in cooperation with alaser interferometer 621 for detecting the position of the X-Y stage612.

A control system 622 controls the above-described plurality of controlcircuits, the reflected electron detector 609, and the Faraday cup 610in synchronism with each other for exposure and alignment based on datafrom a memory 623 which stores information associated with a drawingpattern. The control system 622 is controlled by a CPU 625 whichcontrols the overall operation of the electron beam exposure apparatusthrough an interface 624.

Description of Operation!

The operation of the electron beam exposure apparatus of this embodimentwill be described below with reference to FIG. 27.

Upon receiving pattern data for exposing the wafer, the deflector 606determines the minimum amount of deflection applied to the electron beamon the basis of the minimum line width and the type and shape of linewidth of the exposure pattern to be formed on the wafer. The patterndata is divided in units of exposure areas of each element electronoptical system. A common array consisting of array elements FME is setat an array inverval corresponding to the minimum deflection amount, andthe pattern data is converted into data represented on the common arrayin units of element electron optical systems. For the descriptiveconvenience, processing associated pattern data in exposure using twoelement electron optical systems a and b will be described below.

FIGS. 28A and 28B are views showing exposure patterns Pa and Pb to beformed by the element electron optical systems a and b, respectively, ona common array DM. More specifically, each element electron opticalsystem irradiates an electron beam on the wafer at a hatched arrayposition where the pattern is present by turning off the blankingelectrode.

Normally, the contour portion of the pattern must be precisely exposed.However, a portion except the contour portion of the pattern, i.e.,inner portion of the pattern need not be precisely exposed, and adefined exposure amount need only be satisfied. This operation will bedescribed with reference to FIG. 37.

(S100)

On the basis of data (pattern data) of array positions as shown in FIGS.28A and 28B where exposure must be performed for each element electronoptical system, the CPU 625 determines an area F (black portion) on anarray consisting of array positions (array elements FME) at which thecontour portion is exposed, an area R (hatched portion) on an arrayconsisting of array positions (array elements FME) at which the innerportion of the pattern is exposed, and an area N (white portion) on anarray consisting of array positions (array elements FME) at whichexposure is not performed, as shown in FIGS. 29A and 29B. The contourportion may be regarded as an inner portion depending on the shape ofthe pattern. In this embodiment, the width of the contour portioncorresponds to one array element FME. However, the width of the contourportion may be represented by two array elements FME.

(S200)

On the basis of the data associated with the areas F, R, and N shown inFIGS. 29A and 29B, the CPU 625 determines a first area FF (blackportion) consisting of array positions at which the contour portion isexposed by at least one of the element electron optical systems a and b,a second area RR (hatched portion) different from the first area andconsisting of array positions at which the inner portion of the patternis exposed by at least one of the element electron optical systems a andb, and a third area NN (white portion) consisting of array positions atwhich neither of the element electron optical systems a and b performexposure, as shown in FIG. 30A. The CPU 625 also divides the second areaRR by an array element RME larger than the array interval of the array.At this time, an area which cannot be divided by the array element RMEis added to the first area FF. The result is shown in FIG. 30B.

When a plurality of electron beams are positioned in the first area FFon the array, the electron beams are deflected by the deflector 606using the minimum deflection amount (array interval of the array) as aunit to perform exposure. With this operation, the contour portions ofall exposure patterns to be formed on the wafer can be preciselyreproduced. When the plurality of electron beams are positioned in thesecond area RR on the array, the electron beams are deflected by thedeflector 606 using a deflection amount larger than the minimumdeflection amount (array interval of the array) as a unit to performexposure. With this operation, the inner portion of the pattern whichdoes not need high precision can be formed with a smaller number oftimes of exposure operations. When the plurality of electron beams arepositioned in the third area NN on the array, the positions of theelectron beams are deflected without being set. With this operation,exposure can be performed while minimizing wasteful deflection ofelectron beams.

(S300)

On the basis of data associated with the areas FF, RR, and NN shown inFIG. 30B, the CPU 625 determines the array positions of the arrayelements FME and RME to be exposed, as shown in FIG. 31A, therebypreparing deflection control data for positioning the electron beams atthe array elements FME and RME to be exposed, i.e., sequential dataformed by sequentially arranging a plurality of data of array positionsat which the electron beams must be set in the deflection path, as shownin FIG. 31B.

In this embodiment, the second area RR is divided only by the arrayelement RME larger than the array interval of the array elements FME onthe array. However, an area constituted by the array elements RME may bedivided by an array element XRME larger than the array element RME. Atthis time, an area which cannot be divided by the array element XRME maybe constituted by the array elements RME. The result is shown in FIG.31C. Deflection control data representing only the array elements FME,RME, and XRME to be exposed with the electron beams may be prepared. Thearea constituted by the array elements XRME can be exposed by deflectingthe electron beam by the deflector 606 using, as a unit, a deflectionamount larger than the unit deflection amount for an area constituted bythe array elements RME. Therefore, the inner portion of the patternwhich does not need high precision can be formed with a much smallernumber of times of exposure operations.

(S400)

To perform pattern exposure, the blanking electrodes must be controlledon the basis of the array positions of the plurality of electron beamsto irradiate the electron beams from the element electron opticalsystems. FIGS. 32A and 32B are views showing irradiation of electronbeams from the element electron optical systems in correspondence withthe array positions. More specifically, the electron beam is irradiatedon a hatched array element. The CPU 625 prepares blanking control datacorresponding to the array positions of each element electron opticalsystem.

(S500)

From data of the exposure pattern to be formed on the wafer, as shown inFIG. 33, the CPU 625 prepares exposure control data including the arraypositions, the types of array elements, the blanking control dataincluding the operation time of the blanking electrode of each elementelectron optical system. In this embodiment, the CPU 625 of the electronbeam exposure apparatus performs the above processing. However, evenwhen the processing is performed by an external processing unit, and theexposure control data is transferred to the CPU 625, the object andeffect do not change.

The CPU 625 directs the control system 622 through the interface 624 to"execute exposure". The control system 622 operates as follows on thebasis of data on the memory 623 to which the exposure control data istransferred.

The control system 622 directs the deflection control circuit 617, onthe basis of the exposure control data from the memory 623, which istransferred in synchronism with the internal reference clock, to causethe subdeflector of the deflector 606 to deflect the plurality ofelectron beams from the element electron optical system array 603, andalso directs the blanking control circuit 614 to turn on/off theblanking electrodes of the element electron optical systems inaccordance with the exposure pattern to be formed on the wafer 605.

At this time, the X-Y stage 612 continuously moves in the X and Ydirections. The deflection control circuit 617 controls the deflectionposition of the electron beam in consideration of the moving amount ofthe X-Y stage 612.

The control system 622 changes the OFF time of the blanking electrode ofeach element electron optical system or changes the size of the sourceimage on the wafer depending on the type of array element (FME, RME).Since the array element RME substantially has an exposure area largerthan that of the array element FME, underexposure occurs if the sameexposure time is set for the array elements FME and RME. The blankingelectrode is controlled by the blanking control circuit 614 to prolongthe exposure time for the array element RME. Alternatively, when thearray element RME is to be exposed, the size of crossover image of thesources of the electron gun 601 may be increased by an electron guncontrol circuit 631. Furthermore, the focal length of the elementelectron optical system may be reduced by the first focus/astigmatismcontrol circuit 615 to increase the size of the source image on thewafer (the magnification of the intermediate image formed by the elementelectron optical system is defined on the basis of the ratio of thefocal length of the condenser lens 602 to that of the element electronoptical system). However, when the focal length of the element electronoptical system is to be decreased, the intermediate image formationposition changes. In this case, the position variation of the sourceimage on the wafer along the optical axis, which is caused by thevariation of the intermediate image formation position, may be correctedby a refocus coil (not shown) arranged in the reduction electron opticalsystem 604.

When exposure of the array elements RME and exposure of the arrayelement FME are alternately performed, the load on the control systemincreases. In view of this, the sequential control data may be changedto sequentially perform exposure first at deflection positions of thearray elements RME, as shown in FIG. 34A, and next at deflectionpositions of the array elements FME, as shown in FIG. 34B.

Consequently, the electron beams from the element electron opticalsystems scan to expose exposure fields (EF) on the wafer 605, as shownin FIGS. 32A and 32B. A plurality of electron beams from one subarrayserve to expose a subarray exposure field (SEF) in which the exposurefields of the element electron optical systems in the subarray areadjacent to each other, as shown in FIG. 35. In this way, a subfieldconstituted by subarray exposure fields SEF(A) to SEF(G) on the wafer605 formed by the subarrays A to G, respectively, is exposed, as shownin FIG. 36.

After exposure of subfield 1 shown in FIG. 19, the control system 622directs the deflection control circuit 617 to make the main deflector ofthe deflector 606 deflect the plurality of electron beams from theelement electron optical system array so as to expose subfield 2. Atthis time, the control system 622 commands the second focus/astigmatismcontrol circuit 616 to control the dynamic focus coil 607 on the basisof dynamic focus correction data which has been obtained in advance,thereby correcting the focal position of the reduction electron opticalsystem 604. At the same time, the control system 622 commands control ofthe dynamic stigmatic coil 608 on the basis of dynamic astigmatismcorrection data which has been obtained in advance, thereby correctingthe astigmatism of the reduction electron optical system. The operationof step 1 is performed to expose subfield 2.

The above steps 1 and 2 are repeated to sequentially expose subfields inthe order of 3, 4, . . . , as shown in FIG. 19, thereby exposing theentire surface of the wafer.

According to the first embodiment, even when the size of the exposurepattern to be formed becomes small, a decrease in throughput can beminimized.

(Second Embodiment)

This embodiment provides another operation of the electron beam exposureapparatus according to the first embodiment. Therefore, an electron beamexposure apparatus according to the second embodiment has the samearrangement as that of the electron beam exposure apparatus described inDescription of Constituent Elements of Electron Beam Exposure Apparatus!of the first embodiment.

Prior to wafer exposure by this exposure apparatus, a CPU 625 directs acontrol system 622 through an interface 624 to perform "calibration".The control system 622 determines dynamic astigmatism correction dataand dynamic correction data for each subarray in accordance with theflow chart in FIG. 44.

(step S1100)

As shown in FIG. 39C, cross marks are formed on a stage reference plate613 at positions corresponding to elements which are set when thedeflection area (MEF) of the main deflector of a deflector 606 isdivided to form a matrix of nine elements.

A position where an electron beam from an element electron opticalsystem D(3,3) at the center of an element electron optical system array603 shown in FIG. 24 is irradiated on the wafer without being deflectedis set as a beam reference position. The control system 622 directs astage drive control circuit 620 to move a X-Y stage 612 and set a mark(M(0,0) of the stage reference plate 613 at the beam reference position.

The control system 622 directs a blanking control circuit 614 to turnoff only the blanking electrode of the element electron optical systemD(3,3) while keeping the remaining blanking electrodes ON so that onlythe electron beam from the element electron optical system D(3,3)becomes incident on the stage reference plate 613.

Simultaneously, the control system 622 instructs a deflection controlcircuit 617 to make the main deflector of the deflector 606 deflect anelectron beam BE from the element electron optical system D(3,3) to theposition of a mark M(1,1). As shown in FIG. 39A, the mark M(1,1) isscanned with the electron beam BE in the X direction. Reflectedelectrons/secondary electrons from the mark are detected by a reflectedelectron detector 609 and input to the control system 622. The controlsystem 622 obtains the blur of the beam in the X direction on the basisof the mark data. In addition, the mark M(1,1) is scanned with theelectron beam BE in the Y direction, as shown in FIG. 39B. Reflectedelectrons/secondary electrons from the mark are detected by thereflected electron detector 609 and input to the control system 622. Thecontrol system 622 obtains the blur of the electron beam in the Ydirection on the basis of the mark data.

Next, the control system 622 directs a second focus/astigmatism controlcircuit 616 to change setting of a dynamic stigmatic coil 608 (changethe dynamic astigmatism correction data), scans the mark M(1,1) with theelectron beam BE again, and obtains the blurs of the beam in the X and Ydirections in a similar manner. By repeating the above operation, thecontrol system 622 obtains dynamic astigmatism correction data forsubstantially equalizing the blurs of the beam in the X and Ydirections. With this operation, the optimum dynamic astigmatismcorrection data at the deflection position corresponding to the markM(1,1) is determined. The above operation is performed for all marks,thereby determining optimum dynamic astigmatism correction data atdeflection positions corresponding to the respective marks.

(S1200)

The control system 622 causes the main deflector of the deflector 606 todeflect the electron beam BE from the element electron optical systemD(3,3) to the position of the mark M(1,1) and scans the mark M(1,1) inthe X direction, as shown in FIG. 39A. Reflected electrons/secondaryelectrons from the mark are detected by the reflected electron detector609 and input to the control system 622. The control system 622 obtainsthe blur of the beam on the basis of the mark data. At this time, thedynamic stigmatic coil 608 is controlled on the basis of the dynamicastigmatism correction data obtained previously.

Next, the control system 622 directs the second focus/astigmatismcontrol circuit 616 to change setting of a dynamic focus coil 607(change the dynamic focus correction data), scans the mark M(1,1) withthe electron beam BE again, and obtains the blur of the beam in asimilar manner. By repeating the above operation, the control system 622obtains dynamic focus correction data for minimizing the blurs of thebeam. With this operation, the optimum dynamic focus correction data atthe deflection position corresponding to the mark M(1,1) is determined.The above operation is performed for all marks, thereby determiningoptimum dynamic focus correction data at deflection positionscorresponding to the respective marks.

(S1300)

A position where an electron beam from an element electron opticalsystem A(3,3) of the element electron optical system array 603 shown inFIG. 24 is irradiated on the wafer without being deflected is set as abeam reference position. The control system 622 directs the stage drivecontrol circuit 620 to move the X-Y stage 612 and set the mark (M(0,0)of the stage reference plate 613 at the beam reference position.

The control system 622 directs the blanking control circuit 614 to turnoff only the blanking electrode of the element electron optical systemA(3,3) while keeping the remaining blanking electrodes ON so that onlythe electron beam from the element electron optical system A(3,3)becomes incident on the stage reference plate 613.

Simultaneously, the control system 622 commands the deflection controlcircuit 617 to make the main deflector of the deflector 606 deflect theelectron beam BE from the element electron optical system A(3,3) to theposition of the mark M(1,1). As shown in FIG. 39A, the mark M(1,1) isscanned with the electron beam BE in the X direction. Reflectedelectrons/secondary electrons from the mark are detected by thereflected electron detector 609 and input to the control system 622. Thecontrol system 622 obtains the blur of the beam in the X direction onthe basis of the mark data. In addition, the mark M(1,1) is scanned withthe electron beam BE in the Y direction, as shown in FIG. 39B. Reflectedelectrons/secondary electrons from the mark are detected by thereflected electron detector 609 and input to the control system 622. Thecontrol system 622 obtains the blur of the electron beam in the Ydirection on the basis of the mark data. At this time, the dynamic focuscoil is controlled on the basis of the dynamic focus correction dataobtained in step S1100, and the dynamic stigmatic coil 608 is controlledon the basis of the dynamic astigmatism correction data obtained in stepS1100.

Next, the control system 622 instructs a first focus/astigmatism controlcircuit 615 to change setting of the astigmatism of a subarray A (changethe dynamic astigmatism correction data for each subarray), scans themark M(1,1) with the electron beam BE again, and obtains the blurs ofthe beam in the X and Y directions in a similar manner. By repeating theabove operation, the control system 622 obtains dynamic astigmatismcorrection data for the subarray A, which substantially equalizes andminimizes the blurs of the beam in the X and Y directions. With thisoperation, the optimum dynamic astigmatism correction data for thesubarray A at the deflection position corresponding to the mark M(1,1)is determined. The above operation is performed for all marks, therebydetermining optimum dynamic astigmatism correction data for the subarrayA at deflection positions corresponding to the respective marks.

(S1400)

The control system 622 causes the main deflector of the deflector 606 todeflect the electron beam BE from the element electron optical systemA(3,3) to the position of the mark M(1,1) and scans the mark M(1,1) inthe X direction, as shown in FIG. 39A. Reflected electrons/secondaryelectrons from the mark are detected by the reflected electron detector609 and input to the control system 622. The control system 622 obtainsthe blur of the electron beam on the basis of the mark data. At thistime, the astigmatism of the element electron optical system of thesubarray A is controlled on the basis of the dynamic astigmatismcorrection data for the subarray A obtained previously.

Next, the control system 622 directs the first focus/astigmatism controlcircuit 615 to change setting of the intermediate image formationposition of the element electron optical system of the subarray A(change the dynamic focus correction data for each subarray), scans themark M(1,1) with the electron beam BE again, and obtains the blur of thebeam in a similar manner. By repeating the above operation, the controlsystem 622 obtains dynamic focus correction data for the subarray A,which minimizes the blurs of the beam. With this operation, the optimumdynamic focus correction data for the subarray A at the deflectionposition corresponding to the mark M(1,1) is determined. The aboveoperation is performed for all marks, thereby determining optimumdynamic focus correction data for the subarray A at deflectionpositions-corresponding to the respective marks.

(S1500)

The control system 622 performs the same operation as in step S1300 forelectron beams from element electron optical systems B(3,3), C(3,3),E(3,3), F(3,3), and G(3,3) of the element electron optical system array603 shown in FIG. 24. Consequently, the optimum dynamic focus correctiondata and optimum dynamic astigmatism correction data at deflectionpositions corresponding to the respective marks are determined for allthe subarrays.

The CPU 625 directs the control system 622 through the interface 624 to"execute exposure". The control system 622 operates in the followingmanner.

The control system 622 directs the deflection control circuit 617 tomake the subdeflector of the deflector 606 deflect the plurality ofelectron beams from the element electron optical system array, and atthe same time, directs the blanking control circuit 614 to turn on/offthe blanking electrodes of the element electron optical systems inaccordance with the exposure pattern to be formed on a wafer 605. Atthis time, the X-Y stage 612 continuously moves in the X direction, andthe deflection control circuit 617 controls the deflection position ofthe electron beam in consideration of the moving amount of the X-Y stage612.

As a result, an electron beam from one element electron optical systemscans to expose an exposure field (EF) on the wafer 605 starting fromthe full square, as shown in FIG. 40. As shown in FIG. 35, the exposurefields (EF) of the plurality of element electron optical systems in thesubarray are set to be adjacent to each other. Consequently, a subarrayexposure field (SEF) consisting of the plurality of exposure fields (EF)on the wafer 605 is exposed. Simultaneously, a subfield constituted bysubarray exposure fields SEF(A) to SEF(G) formed by the subarrays A toG, respectively, on the wafer 605 is exposed, as shown in FIG. 36.

After exposure of subfield 1 shown in FIG. 19, the control system 622directs the deflection control circuit 617 to make the main deflector ofthe deflector 606 deflect the plurality of electron beams from theelement electron optical system array so as to expose subfield 2. Atthis time, the control system 622 directs the second focus/astigmatismcontrol circuit 616 to control the dynamic focus coil 607 on the basisof the above-described dynamic focus correction data, thereby correctingthe focal position of the reduction electron optical system 604. At thesame time, the control system 622 directs to control the dynamicstigmatic coil 608 on the basis of the above-described dynamicastigmatism correction data, thereby correcting the astigmatism of thereduction electron optical system. In addition, the control system 622commands the first focus/astigmatism control circuit 615 to control theelectron optical characteristics (intermediate image formation positionsand astigmatisms) of the element electron optical systems on the basisof the dynamic focus correction data and dynamic astigmatism correctiondata for each subarray. The operation in step 1 is performed to exposesubfield 2.

The above steps 1 and 2 are repeated to sequentially expose subfields inthe order of 3, 4, . . . , as shown in FIG. 19, thereby exposing theentire surface of the wafer.

(Third Embodiment)

FIG. 42 is a view showing the difference in constituent elements betweenthe second embodiment and the third embodiment. The same referencenumerals as in FIG. 23 denote the same constituent elements in FIG. 42,and a detailed description thereof will be omitted.

In the third embodiment, a deflector 650 for deflecting an electron beamfrom a subarray is arranged on the reduction electron optical system 604side of an element electron optical system array 603 in correspondencewith each subarray of the element electron optical system array 603. Thedeflector 650 has a function of translating a plurality of intermediateimages formed by the subarrays (in the X and Y directions) and iscontrolled by a control system 622 through a subarray deflection controlcircuit 651.

The operation of this embodiment will be described next.

Prior to wafer exposure by this exposure apparatus, a CPU 625 directsthe control system 622 through an interface 624 to perform"calibration". The control system 622 operates in the following manner.

A position where an electron beam from an element electron opticalsystem A(3,3) of the element electron optical system array 603 shown inFIG. 24 is irradiated on the wafer without being deflected is set as abeam reference position. The control system 622 directs a stage drivecontrol circuit 620 to move an X-Y stage 612 and set a mark M(0,0) of astage reference plate 613 as in the second embodiment at the beamreference position.

The control system 622 directs a blanking control circuit 614 to turnoff only the blanking electrode of the element electron optical systemA(3,3) while keeping the remaining blanking electrodes ON so that onlythe electron beam from the element electron optical system A(3,3)becomes incident on the wafer side.

Simultaneously, the control system 622 directs a deflection controlcircuit 617 to make the main deflector of a deflector 606 deflect anelectron beam BE from the element electron optical system A(3,3) to theposition of a mark M(1,1). As shown in FIG. 39A, the mark M(1,1) isscanned in the X direction. Reflected electrons/secondary electrons fromthe mark are detected by a reflected electron detector 609 and input tothe control system 622. The control system 622 obtains the deviationbetween the actual deflection position and the designed deflectionposition in the X direction on the basis of the mark data. The controlsystem 622 directs the subarray deflection control circuit 651 to changesetting of the X-direction translation of the intermediate image by thedeflector 650 corresponding to a subarray A (change dynamic deflectioncorrection data in the X direction) to cancel the deviation, scans themark M(1,1) with the electron beam BE again, and obtains the deviationbetween the actual deflection position and the designed deflectionposition in a similar manner. By repeating the above operation, thecontrol system 622 obtains dynamic deflection correction data forsubstantially canceling the deviation.

Next, the control system 622 scans the mark M(1,1) in the Y direction,as shown in FIG. 39B. In the same way as described above, the controlsystem 622 obtains dynamic deflection correction data in the Y directionfor substantially canceling the deviation. With this operation, theoptimum dynamic deflection correction data at the deflection positioncorresponding to the mark M(1,1) is determined.

The above operation is performed for all marks, thereby determining theoptimum dynamic deflection correction data at deflection positionscorresponding to the respective marks. The control system 622 performsthe same operation as for the electron beam from the element electronoptical system A(3,3) for electron beams from element electron opticalsystems B(3,3), C(3,3), D(3,3), E(3,3), F(3,3), and G(3,3) of theelement electron optical system array 603 shown in FIG. 24.Consequently, the optimum dynamic deflection correction data atdeflection positions corresponding to the respective marks aredetermined for all the subarrays.

In "execution of exposure", after exposure of subfield 1 shown in FIG.19, the control system 622 directs the deflection control circuit 617 tomake the main deflector of the deflector 606 deflect the plurality ofelectron beams from the element electron optical system array so as toexpose subfield 2. At this time, the control system 622 directs thesubarray deflection control circuit 651 to control the deflector 650corresponding to the subarray on the basis of the above-describeddynamic deflection correction data for each subarray, thereby correctingthe position of each intermediate image along the direction (X and Ydirections) perpendicular to the optical axis.

As described above, according to this embodiment, an electron beamexposure apparatus which can optimally correct deflection errorsgenerated in the plurality of electron beams passing through thereduction electron optical system when the deflector is actuated inunits of electron beams can be provided.

Third Mode of Carrying Out the Invention

An embodiment of a method of producing a device by using theabove-described electron beam exposure apparatus and method will bedescribed below.

FIG. 45 is a flow chart showing the manufacture of a microdevice (asemiconductor chip such as an IC or LSI, a liquid crystal panel, a CCD,a thin-film magnetic head, a micromachine, or the like). In step 1(circuit design), the circuit of a semiconductor device is designed. Instep 2 (preparation of exposure control data), exposure control data forthe exposure apparatus is prepared on the basis of the designed circuitpattern. In step 3 (manufacture of wafer), a wafer is manufactured usinga material such as silicon. Step 4 (wafer process) is called apreprocess in which the exposure apparatus to which the preparedexposure control data is input and the wafer are used to form an actualcircuit on the wafer by lithography. Step 5 (assembly) is called apostprocess in which semiconductor chips are formed from the wafermanufactured in step 4. The postprocess includes an assembly process(dicing and bonding) and packaging process (chip encapsulating). In step6 (inspection), the operation confirmation test, durability test, andthe like are performed for the semiconductor device manufactured in step5. With these processes, a semiconductor device is completed anddelivered (step 7).

FIG. 46 is a flow chart showing the wafer process in detail. In step 11(oxidation), the surface of the wafer is oxidized. In step 12 (CVD), aninsulating film is formed on the surface of the wafer. In step 13(electrode formation), an electrode is formed on the wafer bydeposition. In step 14 (ion implantation), ions are implanted in thewafer. In step 15 (resist processing), a photosensitive agent is appliedon the wafer. In step 16 (exposure), the circuit pattern is formed onthe wafer by exposure using the above-described exposure apparatus. Instep 17 (development), the exposed wafer is developed. In step 18(etching), portions other than the developed resist image are etched. Instep 19 (resist removal), the unnecessary resist after etching isremoved. By repeating these processes, multiple circuit patterns areformed on the wafer.

When the manufacturing method of this embodiment is used, ahigh-integration semiconductor device which is conventionally difficultto manufacture can be manufactured at a low cost.

The present invention is not limited to the above embodiments andvarious changes and modifications can be made within the spirit andscope of the present invention. Therefore, to apprise the public of thescope of present invention the following claims are made.

What is claimed is:
 1. An electron beam exposure apparatus having asource for emitting electron beams and a reduction electron opticalsystem for reducing and projecting, on a target exposure surface, animage formed with the electron beam emitted from said source,comprising:a correction electron optical system arranged between saidsource and said reduction electron optical system to form a plurality ofintermediate images of said source for correcting an aberrationgenerated by said reduction electron optical system, the intermediateimages being reduced and projected on said target exposure surface bysaid reduction electron optical system.
 2. The apparatus according toclaim 1, wherein positions of the intermediate images formed by saidcorrection electron optical system are set depending on curvature offield of said reduction electron optical system.
 3. The apparatusaccording to claim 1, wherein positions of the intermediate imagesformed by said correction electron optical system are set depending ondistortion of said reduction electron optical system.
 4. The apparatusaccording to claim 1, wherein said correction electron optical systemforms the intermediate images for correcting astigmatism of saidreduction electron optical system.
 5. The apparatus according to claim1, wherein said correction electron optical system has a plurality ofelement electron optical systems each of which forms one intermediateimage.
 6. The apparatus according to claim 5, wherein focal lengths ofsaid plurality of element electron optical systems are adjusted tocorrect the aberration generated by said reduction electron opticalsystem.
 7. The apparatus according to claim 6, wherein each of saidelement electron optical systems includes a unipotential lens.
 8. Theapparatus according to claim 5, wherein principal surface positions ofsaid plurality of element electron optical systems are adjusted tocorrect the aberration generated by said reduction electron opticalsystem.
 9. The apparatus according to claim 8, wherein said plurality ofelement electron optical systems have substantially the same focallength.
 10. The apparatus according to claim 9, wherein each of saidelement electron optical systems includes a plurality of unipotentiallenses.
 11. The apparatus according to claim 5, wherein astigmatism ofeach of said element electron optical systems is adjusted to correctastigmatism generated by said reduction electron optical system.
 12. Theapparatus according to claim 11, wherein each of said element electronoptical systems includes a unipotential lens, and an aperture electrodeof said unipotential lens has a substantially elliptical shape tocorrect the astigmatism generated by said reduction electron opticalsystem.
 13. The apparatus according to claim 11, wherein each of saidelement electron optical systems includes a unipotential lens, and saidunipotential lens has at least two sets of opposing electrodes.
 14. Theapparatus according to claim 5, wherein coma of each of said elementelectron optical systems is adjusted to correct coma generated by saidreduction electron optical system.
 15. The apparatus according to claim14, wherein each of said element electron optical systems includes aunipotential lens and an aperture, and an optical axis of saidunipotential lens is decentered with respect to a center of the apertureto correct the coma generated by said reduction electron optical system.16. The apparatus according to claim 5, wherein a position of each ofsaid element electron optical systems in a direction perpendicular to anoptical axis of said reduction electron optical system is determined tocorrect distortion generated by said reduction electron optical system.17. The apparatus according to claim 5, further comprising electron beamshielding means capable of independently shielding electron beams fromsaid element electron optical systems.
 18. The apparatus according toclaim 17, wherein said electron beam shielding means shields theelectron beam in accordance with an exposure pattern to be formed onsaid target exposure surface.
 19. The apparatus according to claim 5,wherein each of said element electron optical systems has an aperturefor defining a shape of an electron beam incident on said elementelectron optical system.
 20. The apparatus according to claim 19,wherein each of said element electron optical systems has deflectionmeans for deflecting the electron beam incident on said element electronoptical system, and shielding means for shielding the electron beam whenthe electron beam is deflected by said deflection means and passing theelectron beam when the electron beam is not deflected by said deflectionmeans.
 21. The apparatus according to claim 20, wherein said shieldingmeans is arranged at a pupil position of said reduction electron opticalsystem.
 22. The apparatus according to claim 5, wherein said pluralityof element electron optical systems are formed on the same substrate.23. The apparatus according to claim 1, further comprising electron beamshielding means capable of shielding the electron beam in units ofintermediate images.
 24. The apparatus according to claim 23, whereinsaid electron beam shielding means shields the electron beam inaccordance with an exposure pattern to be formed on said target exposuresurface.
 25. The apparatus according to claim 1, further comprisingposition adjustment means for adjusting positions of the intermediateimages along a direction perpendicular to an optical axis of saidreduction electron optical system.
 26. The apparatus according to claim25, further comprising position detection means for detecting positionsat which the intermediate images are reduced and projected by saidreduction electron optical system, and wherein said position adjustmentmeans adjusts the positions of the intermediate images to predeterminedpositions on the basis of a detection result from said positiondetection means.
 27. The apparatus according to claim 1, furthercomprising position adjustment means for adjusting positions of theintermediate images along an optical axis of said reduction electronoptical system.
 28. The apparatus according to claim 27, furthercomprising position detection means for detecting positions at which theintermediate images are reduced and projected by said reduction electronoptical system, and wherein said position adjustment means adjusts thepositions of the intermediate images to predetermined positions on thebasis of a detection result from said position detection means.
 29. Theapparatus according to claim 1, wherein said reduction electron opticalsystem has magnification adjustment means for adjusting a magnification.30. The apparatus according to claim 29, further comprising positiondetection means for detecting positions at which the intermediate imagesare reduced and projected by said reduction electron optical system, andwherein said magnification adjustment means adjusts the magnification onthe basis of a detection result from said position detection means. 31.The apparatus according to claim 1, wherein said reduction electronoptical system has deflection means for scanning electron beamsaccording to the intermediate images in said target exposure surface,and deflection error correction means for correcting an aberrationgenerated upon deflection of the electron beams by said deflectionmeans.
 32. The apparatus according to claim 1, further comprisingchanging means for changing a size of said source.
 33. A devicemanufacturing method of manufacturing a device by using an electron beamexposure apparatus of claim
 1. 34. An electron beam exposure method inwhich exposure is performed by making a source emit an electron beam toform an image, and reducing and projecting the image on a targetexposure surface by a reduction electron optical system, comprising:theintermediate image formation step of forming a plurality of intermediateimages of said source for correcting an aberration generated by saidreduction electron optical system by a correction electron opticalsystem arranged between said source and said reduction electron opticalsystem.
 35. The method according to claim 34, further comprising thedetection step of detecting positions at which the intermediate imagesare reduced and projected by said reduction electron optical system, andthe position adjustment step of adjusting positions of the intermediateimages along a direction perpendicular to an optical axis of saidreduction electron optical system.
 36. The method according to claim 34,further comprising the detection step of detecting positions at whichthe intermediate images are reduced and projected by said reductionelectron optical system, and the position adjustment step of adjustingpositions of the intermediate images along an optical axis of saidreduction electron optical system.
 37. The method according to claim 34,further comprising the detection step of detecting positions at whichthe intermediate images are reduced and projected by said reductionelectron optical system, and the magnification adjustment step ofadjusting a magnification of said reduction electron optical system onthe basis of a detection result in the detection step.
 38. The methodaccording to claim 34, further comprising the deflection step ofscanning electron beams according to the intermediate images in saidtarget exposure surface, and the deflection error correction step ofcorrecting an aberration generated upon deflection of the electronbeams.
 39. The method according to claim 38, wherein the deflectionerror correction step includes the step of adjusting positions of theintermediate images along an optical axis of said reduction electronoptical system.
 40. A device manufacturing method of manufacturing adevice by using an electron beam exposure method of claim
 34. 41. Anelectron beam exposure apparatus having a source for emitting anelectron beam, and a reduction electron optical system for reducing andprojecting, on a target exposure surface, an image formed with theelectron beam emitted from said source, comprising:an element electronoptical system array constituted by arranging a plurality of subarrayseach including at least one element electron optical system which formsan intermediate image of said source between said source and saidreduction electron optical system with the electron beam emitted fromsaid source; deflection means for deflecting an electron beam from saidelement electron optical system array to scan said target exposuresurface; and correction means for correcting in units of subarrays adeflection error generated when the electron beam from said elementelectron optical system array is deflected by said deflection means. 42.The apparatus according to claim 41, wherein said correction meanscomprises:first adjustment means for adjusting electron opticalcharacteristics of said element electron optical system in units ofsubarrays; and second adjustment means for adjusting electron opticalcharacteristics of said reduction electron optical system in units ofsubarrays.
 43. The apparatus according to claim 42, wherein said firstadjustment means has intermediate image formation position adjustmentmeans for adjusting a position of the intermediate image formed by saidelement electron optical system along an optical axis of said reductionelectron optical system in units of subarrays.
 44. The apparatusaccording to claim 43, wherein said element electron optical systemincludes a unipotential lens, and said intermediate image formationposition adjustment means adjusts a focal length of said unipotentiallens.
 45. The apparatus according to claim 43, wherein said firstadjustment means further comprises means for adjusting astigmatism ofsaid element electron optical system in units of subarrays.
 46. Theapparatus according to claim 42, wherein said first adjustment means hasmeans for adjusting astigmatism of said element electron optical systemin units of subarrays.
 47. The apparatus according to claim 42, whereinsaid second adjustment means has means for adjusting a focal position ofsaid element electron optical system in units of subarrays.
 48. Theapparatus according to claim 47, wherein said second adjustment meansfurther comprises means for adjusting astigmatism of said elementelectron optical system in units of subarrays.
 49. The apparatusaccording to claim 42, wherein said second adjustment means has meansfor adjusting astigmatism of said element electron optical system inunits of subarrays.
 50. The apparatus according to claim 42, whereinsaid first adjustment means has intermediate image formation positionadjustment means for adjusting a position of the intermediate imageformed by said element electron optical system along a directionperpendicular to an optical axis of said reduction electron opticalsystem in units of subarrays.
 51. The apparatus according to claim 41,wherein said element electron optical system is set, in an initialstate, to form an intermediate image for correcting an aberrationgenerated by said reduction electron optical system.
 52. A devicemanufacturing method of manufacturing a device by using an electron beamexposure apparatus of claim
 41. 53. An electron beam exposure method inwhich exposure is performed by making a source emit an electron beam toform an image, and reducing and projecting the image on a targetexposure surface by a reduction electron optical system, comprising:thecorrection step of correcting, in units of subarrays, a deflection errorgenerated when an electron beam from an element electron optical systemarray constituted by arranging said plurality of subarrays eachincluding at least one element electron optical system which forms anintermediate image between said source and said reduction system isdeflected to scan said target exposure surface.
 54. The method accordingto claim 53, wherein the correction step includes:the first adjustmentstep of adjusting electron optical characteristics of said elementelectron optical system in units of subarrays; and the second adjustmentstep of adjusting electron optical characteristics of said reductionelectron optical system in units of subarrays.
 55. The method accordingto claim 54, wherein the first adjustment step includes the intermediateimage formation position adjustment step of adjusting a position of theintermediate image formed by said element electron optical system alongan optical axis of said reduction electron optical system in units ofsubarrays.
 56. The method according to claim 55, wherein said elementelectron optical system includes a unipotential lens, and theintermediate image formation position adjustment step includes the stepof adjusting a focal length of said unipotential lens.
 57. The methodaccording to claim 54, wherein the first adjustment step includes thestep of adjusting astigmatism of said element electron optical system inunits of subarrays.
 58. The method according to claim 54, wherein thesecond adjustment means includes the step of adjusting a focal positionof said element electron optical system in units of subarrays.
 59. Themethod according to claim 58, wherein the second adjustment step furthercomprises the step of adjusting astigmatism of said element electronoptical system in units of subarrays.
 60. The method according to claim54, wherein the second adjustment step includes the step of adjustingastigmatism of said element electron optical system in units ofsubarrays.
 61. The method according to claim 54, wherein the firstadjustment step includes the intermediate image formation positionadjustment step for adjusting a position of the intermediate imageformed by said element electron optical system along a directionperpendicular to an optical axis of said reduction electron opticalsystem in units of subarrays.
 62. The method according to claim 53,wherein the first adjustment step further comprises the step ofadjusting astigmatism of said element electron optical system in unitsof subarrays.
 63. A device manufacturing method of manufacturing adevice by using an electron beam exposure method of claim 53.